JPH0469331B2 - - Google Patents

Info

Publication number
JPH0469331B2
JPH0469331B2 JP59228408A JP22840884A JPH0469331B2 JP H0469331 B2 JPH0469331 B2 JP H0469331B2 JP 59228408 A JP59228408 A JP 59228408A JP 22840884 A JP22840884 A JP 22840884A JP H0469331 B2 JPH0469331 B2 JP H0469331B2
Authority
JP
Japan
Prior art keywords
gate
defect
video signal
size
setting
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59228408A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61107143A (ja
Inventor
Yoshimoto Nakajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP22840884A priority Critical patent/JPS61107143A/ja
Publication of JPS61107143A publication Critical patent/JPS61107143A/ja
Publication of JPH0469331B2 publication Critical patent/JPH0469331B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/93—Detection standards; Calibrating baseline adjustment, drift correction

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Materials By The Use Of Optical Means Adapted For Particular Applications (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP22840884A 1984-10-30 1984-10-30 光学的表面検査装置 Granted JPS61107143A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP22840884A JPS61107143A (ja) 1984-10-30 1984-10-30 光学的表面検査装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP22840884A JPS61107143A (ja) 1984-10-30 1984-10-30 光学的表面検査装置

Publications (2)

Publication Number Publication Date
JPS61107143A JPS61107143A (ja) 1986-05-26
JPH0469331B2 true JPH0469331B2 (en]) 1992-11-05

Family

ID=16875998

Family Applications (1)

Application Number Title Priority Date Filing Date
JP22840884A Granted JPS61107143A (ja) 1984-10-30 1984-10-30 光学的表面検査装置

Country Status (1)

Country Link
JP (1) JPS61107143A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5922556B2 (ja) * 2012-11-01 2016-05-24 日立Ｇｅニュークリア・エナジー株式会社 溶接検査装置及び溶接検査方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5187092A (ja) * 1975-01-28 1976-07-30 Canon Kk Hyomenkensasochi
JPS5920972B2 (ja) * 1977-06-03 1984-05-16 オムロン株式会社 欠点検出装置
JPS5571937A (en) * 1978-11-24 1980-05-30 Kanebo Ltd Method of and device for inspecting surface

Also Published As

Publication number Publication date
JPS61107143A (ja) 1986-05-26

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